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Close up showing blue caps and shoulders of rows of specialty gas cylinders at Alpha New Jersey. Newly labelled and netted cylinders, ready for delivery.

Electronic Special Gases Operating a global network of production plants strategically located in core manufacturing hubs to bring you the full range of special gases supporting all electronics manufacturing processes

Offering over 100 specialty gases and mixtures, we are the first and global choice for electronic special gases. Our extensive process knowledge ensures that our electronic gases exceed your most stringent purity and consistency demands.

Our network of electronic special gas production plants worldwide are strategically located in key manufacturing markets. This gives you the benefit of timely deliveries and flexibility and security of supply.

Electronic special gases are shipped in a variety of container sizes to fit your individual application needs. These include cylinders, ton tanks, tube trailers, and ISO containers.


Deposition

Etch

Ammonia (NH3) Boron trichloride (BCl3)
Dichlorosilane (SiH2Cl2) Carbon dioxide (CO2)
Disilane (Si2H6) Carbon monoxide (CO)
Hexachlorodisilane (Si2Cl6) Chlorine (Cl2)
Monomethylsilane (MMS) Chlorine trifluoride (ClF3)
Nitric oxide (NO) Difluoromethane - Halocarbon 32 (CH2F2)
Nitrous oxide (N2O) *Fluorine (F2)
Oxygen (O2)
Fluorine Nitrogen mixture (20% F2/N2 mixture)
Silane (SiH4) Hexafluoro-1, 3-butadiene - Halocarbon 2316 (C4F6)
Trichlorosilane (SiHCl3) Hexafluoroethane - Halocarbon 116 (C2F6)
Trimethylsilane (3MS) Hydrogen bromide (HBr)
Tungsten hexafluoride (WF6) Hydrogen chloride (HCl)
Hydrogen fluoride (aHF)
Methyl fluoride - Halocarbon 41 (CH3F)

Nitrogen trifluoride (NF3)

Octofluorocyclobutane - Halocarbon 318 (C4F8)

Octofluorocyclopentene - Halocarbon 1418 (C5F8)

Octofluoropropane - Halocarbon 218 (C3F8)

Silicon tetrafluoride (SiF4)

Sulphur hexafluoride (SF6)

Tetrafluoromethane - Halocarbon 14 (CF4)

Trifluoromethane - Halocarbon 23 (CHF3)

Xenon difluoride (XeF2)

Doping

Others

Arsine (AsH3) Argon (Ar)
Boron-11 trifluoride (11BF3) Helium (He)
Diborane (B2H6) *Hydrogen (H2)
Diborane (11B2H6) Hydrogen sulphide (H2S)
Germane (GeH4) *Nitrogen (N2)
Phosphine (PH3)
Trimethyl-Boron (TMB)

* Can be supplied from on-site generator


Availability and specifications may vary by location. Please contact your local Linde Gas office.

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Download Ammonia Datasheet(PDF 802.0 KB) Download Ammonia: A Feedstock Providing the Platform for Electronics article(PDF 2.0 MB) Download Anhydrous Hydrogen Fluoride datasheet(PDF 639.0 KB) Download Arsine datasheet(PDF 716.0 KB) Download Boron Trichloride datasheet(PDF 736.0 KB) Download Boron Trifluoride datasheet(PDF 350.0 KB) Download Dichlorosilane Datasheet(PDF 817.0 KB) Download Disilane datasheet(PDF 867.0 KB) Download Fluorine Datasheet(PDF 656.0 KB) Download - Germane (GeH4) datasheet(PDF 934.0 KB) Download Hexachlorodisilane Datasheet(PDF 868.0 KB) Download Hexafluoro-1, 3-Butadiene datasheet(PDF 889.0 KB) Download Hexafluoroethane datasheet(PDF 748.0 KB) Download Hydrogen Bromide datasheet(PDF 603.0 KB) Download Hydrogen Chloride Datasheet(PDF 738.0 KB) Download Nitrogen Trifluoride datasheet(PDF 747.0 KB) Download Nitrous Oxide datasheet(PDF 790.0 KB) Download Octafluorocyclobutane datasheet(PDF 769.0 KB) Download Octofluorocyclopentene datasheet(PDF 842.0 KB) Download Octafluoropropane datasheet(PDF 807.0 KB) Download Phosphine datasheet(PDF 710.0 KB) Download Silane datasheet(PDF 752.0 KB) Download Sulfur Hexafluoride datasheet(PDF 674.0 KB) Download Trichlorosilane datasheet(PDF 849.0 KB) Download Tungsten Hexafluoride datasheet(PDF 824.0 KB) Download Xenon Difluoride datasheet(PDF 716.0 KB) Carbon Dioxide in Semiconductor Manufacturing - Specialty Gas Report article(PDF 458.0 KB) Helium in Electronics: Enabling Leading-Edge Semiconductor Manufacturing(PDF 3.0 MB) Hydrogen in Electronics: Growing Applications and Consumption - Silicon Semiconductor article(PDF 6.0 MB) Innovations in Materials Recovery - Silicon Semiconductor article(PDF 4.0 MB) Nitrous Oxide - Not a Laughing Matter in Electronics Manufacturing - Gasworld article(PDF 788.0 KB)
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